Semiconductor Fabs
Semiconductor fabrication plants (fabs) are high-tech manufacturing environments where integrated circuits (chips) are produced. These ultra-clean and precisely controlled facilities are essential to global technology development and demand extremely stable thermal conditions.
Key characteristics of semiconductor fabrication plants:
Process Cooling in Semiconductor Fabs
Process cooling systems are essential for maintaining the precise thermal conditions required throughout semiconductor manufacturing. These systems ensure both the manufacturing equipment and delicate wafer processes remain within tightly controlled temperature ranges, helping to prevent defects and maintain high product yield.
Cooling supports a variety of critical functions in the fab environment. It allows for temperature-sensitive steps – such as photolithography and chemical vapour deposition – to be performed under optimal conditions. It also prevents equipment from overheating, maintains environmental consistency in cleanrooms, and reduces production downtime, which improves both operational efficiency and the longevity of expensive tools.
Recirculating chillers, water-to-water heat exchangers, and carefully selected heat transfer fluids are commonly deployed to manage these thermal demands, all while meeting the cleanliness and reliability requirements of the semiconductor industry.
Recirculating Chillers
Recirculating chillers are closed-loop systems designed to maintain stable temperatures by continuously cycling a heat transfer fluid. In semiconductor fabs, they play a crucial role in cooling critical tools such as etchers, vacuum pumps, laser systems, and wafer handling equipment. Their ability to precisely regulate fluid temperatures is vital for protecting both the equipment and the integrity of temperature-sensitive processes like photoresist application and deposition.
These chillers provide accurate thermal control while minimising water usage through recirculation. Their closed-loop design helps to eliminate contamination risks, which is especially important in ultra-clean environments. While they offer flexibility and can be customised for specific equipment or process needs, they do come with some challenges. Initial installation costs can be high, and their complexity means regular maintenance is required. Additionally, larger systems may demand more physical space within already contrained fab layouts.
Water-to-Water Heat Exchangers
Water-to-water heat exchangers are widely used in semiconductor fabs to manage heat transfer between two isolated water circuits. This separation allows heat generated by the manufacturing process to be removed efficiently without cross-contamination, which is vital in maintaining the cleanroom environment and protecting sensitive semiconductor processes.
These systems offer excellent thermal control and reliability, especially when integrated with a fab’s central or secondary infrastructure. By transferring heat from tool-specific cooling circuits to broader facility loops, they help stabilise operating temperatures across the production line. Water-to-water heat exchanger also scale well, making them suitable for use in both individual tool cooling and larger facility-wide thermal management strategies.
Heat Transfer Fluids
The choice of heat transfer fluid is critical in semiconductor fabs, where precise thermal control, chemical stability, and ultra-clean performance are essential. The fluids used must deliver reliable performance across a range of demanding conditions while avoiding any risk of contamination or chemical reactivity that could compromise the manufacturing environment.
When selecting a heat transfer fluid, several important factors must be considered. The fluid must perform well thermally, maintaining stability, strong conductivity, and high heat capacity across the full range of operating temperatures. Chemical purity, stability, and non-reactivity are vital to prevent damage to equipment and contamination of cleanroom environments. Environmental and safety attributes such as toxicity, biodegradability, and low global warming potential (GWP) are increasingly important. In addition, the chosen fluid should be compatible with system components, require minimal maintenance, and comply with all relevant industry regulations and standards.
The most commonly used fluid in semiconductor fabs, deionised water offers high thermal capacity and excellent conductivity while being ultra-pure, minimising the risk of corrosion or contamination.
Ethylene or propylene glycol blended with water is used to extend the operating temperature range, providing freeze and boil protection; propylene glycol is often preferred where lower toxicity is required.
These non-conductive, chemically stable fluids are ideal for sensitive applications, offering excellent safety due to their low reactivity and non-flammable properties.
Known for their stability over a wide temperature range, silicone oils maintain performance in both low- and high-temperature conditions without breaking down or degrading.
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